
High-purity Oxygen
Supplied in seamless steel high-pressure cylinders and manifold cylinder pallets (MCP), it is used in analytical testing setups, specialty glass manufacturing, precision laser cutting, and microelectronics atmosphere control.
Introduction
High-purity oxygen is a compressed industrial gas produced through cryogenic air separation, refined to control trace moisture, nitrogen, argon, carbon oxides, and total hydrocarbons.
Supplied in seamless steel high-pressure cylinders and manifold cylinder pallets (MCP), it is used in analytical testing setups, specialty glass manufacturing, precision laser cutting, and microelectronics atmosphere control.
Oxygen Purity Grades
|
Parameter |
Grade 4.5 |
Grade 5.0 |
Grade 6.0 |
|
Minimum Oxygen Purity |
99.995% |
99.999% |
99.9999% |
|
Grade Designation |
Industrial High Purity |
Research / Analytical Grade |
Ultra-High Purity |
|
Specification Basis |
Enterprise Specification |
Enterprise Specification |
Enterprise Spec (Referencing SEMI C54-0624 Parameter Guidelines) |
|
Guaranteed Total Impurity Limit |
≤ 50.0 ppmv |
≤ 10.0 ppmv |
≤ 1.0 ppmv |
|
Typical Measured Purity |
99.997% |
99.9993% |
99.99992% |
Trace Impurity Limits
|
Impurity |
Formula |
Grade 4.5 (ppmv) |
Grade 5.0 (ppmv) |
Grade 6.0 (ppmv) |
Analytical Method |
|
Nitrogen |
N₂ |
≤ 20.0 |
≤ 4.0 |
≤ 0.30 |
GC-TCD / GC-PDHID |
|
Argon |
Ar |
≤ 15.0 |
≤ 3.0 |
≤ 0.15 |
GC-PDHID |
|
Moisture |
H₂O |
≤ 5.0 |
≤ 1.0 |
≤ 0.15 |
Electrolytic Hygrometer / CRDS |
|
Carbon Monoxide |
CO |
≤ 1.0 |
≤ 0.3 |
≤ 0.05 |
GC-FID (with Methanizer) |
|
Carbon Dioxide |
CO₂ |
≤ 2.0 |
≤ 0.3 |
≤ 0.05 |
GC-FID (with Methanizer) |
|
Total Hydrocarbons |
THC (as CH₄) |
≤ 2.0 |
≤ 0.3 |
≤ 0.05 |
FID |
|
Hydrogen |
H₂ |
≤ 2.0 |
≤ 0.3 |
≤ 0.05 |
GC-PDHID |
Industry Applications
Semiconductor & Microelectronics: Grade 6.0 provides atmosphere control and supports silicon wafer processing where controlling trace moisture and hydrocarbons is critical for repeatability.
Laboratory & Analytical Instruments: Grade 5.0 serves as a support gas for thermal analysis and combustion-based laboratory instrumentation requiring a stable baseline.
Specialty Glass Production: High-purity oxygen powers oxy-fuel combustion systems, maintaining high melting temperatures and flame stability.
Precision Thermal Cutting: Used as an assist gas in laser cutting to optimize cut-edge squareness and processing speed based on equipment settings.
Quality Control
Pre-Fill Handling: Returned cylinders undergo residual pressure verification, valve inspection, and mandatory evacuation before connection to filling manifolds.
Dedicated Infrastructure: Filling lines utilize dedicated stainless steel manifolds with inline particulate filtration to prevent cross-contamination.
In-Line Process Sampling: Purity and key impurity levels are sampled at designated manifold checkpoints during filling.
Non-Conformance Handling: Any gas batch failing analytical thresholds is isolated and routed for re-processing according to internal SOPs.
Safety & Handling Requirements
Safety Data Sheet: Official SDS is available upon request (UN 1072 for Compressed Gas; UN 1073 for Refrigerated Liquid).
Oxidizing Risk: Non-flammable gas, but a strong oxidizer that accelerates combustion. Keep isolated from oils, greases, and combustibles.
Storage & Handling: Secure cylinders upright in well-ventilated, shaded areas using safety chains or racks, away from direct heat.
Equipment Compatibility: Regulators, valves, and piping connected to high-pressure oxygen systems must be cleaned for oxygen service (referencing ASTM G93 / CGA G-4.1 guidelines).
Transport Classification: UN 1072 (Oxygen, Compressed) is classified as Class 2.2 Non-Flammable Gas with a Class 5.1 Subsidiary Risk (Oxidizer) under UN/IMO regulations.
Packaging & Logistics
Supply Options: Individual high-pressure cylinders or 12-cylinder manifold pallets (MCP) based on site consumption rates.
Minimum Order Quantity (MOQ): 20 cylinders for 40L/50L models, or 1 MCP unit.
Lead Time: 10 to 15 working days following specification approval and deposit.
Trade Terms: FOB, CIF, or CFR according to agreement.
Export Documentation: Includes Packing List, Commercial Invoice, Certificate of Origin, SDS, and Dangerous Goods Declaration.
Compliance
Quality Management: Operating under an ISO 9001 certified system covering cylinder handling, filling operations, and laboratory testing workflows.
Pressure Vessels: Cylinder bodies conform to ISO 9809-1 manufacturing specifications.
Batch Verification: Factory COAs are issued by our internal laboratory for every verified order batch.
Third-Party Inspection: Independent sampling and inspection (e.g., SGS, Intertek) can be arranged prior to shipment upon buyer agreement.
FAQ
Q: Can nitrogen or air-system equipment be used?
A: No. Equipment exposed to oil, grease, or air must be cleaned for oxygen service in accordance with ASTM G93 or CGA G-4.1. Use oxygen-rated brass or stainless-steel regulators and compatible fittings.
Q: What warranty and support are provided?
A: Gas purity is guaranteed according to the COA at delivery. Valid claims supported by independent analysis within 30 days may qualify for replacement or credit. Remote support responds within 24 hours, with cylinder return and refill programs available.
Q: How much oxygen does each cylinder contain?
A: At 200 bar, a 40 L cylinder holds approximately 6.2 Nm³, while a 50 L cylinder holds about 7.8 Nm³. A 12-cylinder pallet provides approximately 74–94 Nm³.
Q: How long does one cylinder last?
A: A 40 L cylinder at 200 bar lasts approximately 20 hours at 5 L/min or 5 hours at 20 L/min.
Q: How are cylinders prepared for oxygen service?
A: Cylinders are degreased, vacuum-baked, and purged before filling. Oxygen-compatible valves with oil-free seals, such as CGA 540, DIN 477 No. 9, or BS 341 No. 3, are used to reduce ignition risks and control moisture.
Q: When is a manifold pallet more economical?
A: Pallets are generally more economical above 60 Nm³/month. Below 20 Nm³/month, individual cylinders are usually more cost-effective.
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